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To render the surface of a material capable of withstanding mechanical and electrochemical loads, and to perform well in service, the deposition of a thin film or coating is a solution. In this project, such a thin film deposition is carried out. The coating material chosen is titanium nitride (TiN) which is a ceramic material known to possess a high hardness (>10 GPa) as well as good corrosion resistance. The method of deposition selected is high power impulse magnetron sputtering (HiPIMS) that results in coatings with high quality and enhanced properties. Sputtering is a physical process that represents the removal or dislodgment of surface atoms by energetic particle bombardment. The term magnetron indicates that a magnetic field is utilized to increase the efficiency of the sputtering process. In HiPIMS, a high power is applied in pulses of low duty cycles to a cathode that is sputtered and that consists of the coating material. As result of the high power, the ionization of the sputtered material takes place giving the possibility to control these species with electric and magnetic field allowing thereby the improvement and tuning of coating properties. However, the drawback of HiPIMS is a low deposition rate.
In this project, it is demonstrated first that it is possible to deposit TiN coating using HiPIMS with an optimized deposition rate, by varying the magnetic field strength. It was found that low magnetic field strength (here 22mT) results in a deposition rate similar to that of conventional magnetron sputtering in which the average power is applied continuously, called also direct current magnetron sputtering (dcMS). The high deposition rate at low magnetic field strength was attributed to a reduction in the back attraction probability of the sputtered species. The magnetic field strength did not show noticeable influence on the mechanical properties. The proposed explanation was that the considered peak current density interval 1.22-1.72 A∙cm-2 does not exhibit dramatic changes in the plasma dynamics.
In a second part, using the optimized deposition rate, the optimized chemical composition of TiN was determined. It was shown that the chemical composition of TiN does not significantly influence the corrosion performance but impacts considerably the mechanical properties. It was also shown that the corrosion resistance of the coatings deposited using HiPIMS was higher than that of the coatings deposited using dcMS.
The third study was the effect of annealing post deposition on the properties of TiN coating deposited using HiPIMS. The hardness of the coatings showed a maximum at 400°C reaching 24.8 GPa. Above 400°C however, a lowering of the hardness was measured and was due to the oxidation of TiN which led to the formation of TiN-TiO2 composites with lower mechanical properties.
The coating microscopic properties such as crystal orientation, residual stresses, average grain size were determined from X-ray diffraction data and the roughness was measured using atomic force microscopy. These properties were found to vary with the magnetic field strength, the chemical composition as well as the annealing temperature.
The three biodegradable polymers polylactic acid (PLA), polyhydroxybutyrate (PHB) and polybutylene adipate terephthalate (PBAT) were coated with hydrogenated amorphous carbon layers (a-C:H) in the context of this thesis. A direct alignment of the sample surface to the source was chosen, resulting in the deposition of a robust, r-type a-C:H. At the same time, a partly covered silicon wafer was placed together with the polymers in the coating chamber and was coated. Silicon is a hard material and serves as a reference for the applied layers. Due to the hardness of the material, no mixed phase occurs between the substrate and the applied layer (no interlayer formation). In addition, the thickness of the applied layer can be estimated with the help of the silicon sample.
The deposition of the layer was realized by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). For the coating the samples were pre-treated with an oxygen plasma. Acetylene was used as precursor gas for the plasma coating. Coatings with increasing thickness in 50 nm steps from 0-500 nm were realised.
The surface analysis was performed using several techniques: The morphology and layer stability were analyzed with scanning electron microscopy (SEM) measurements. The wettability was determined by contact angle technique. In addition, the contact angles provide macroscopic information about the bond types of the carbon atoms present on the surface. For microscopic analysis of the chemical composition of the sample and layer surfaces, diffuse reflectance Fourier transform infrared spectroscopy (DRIFT) as well as synchrotron based X-ray photon spectroscopy (XPS) and near edge X-ray absorption fine structure spectroscopy (NEXAFS) were used.
All coated polymers showed several cases of layer failure due to internal stress in the layers. However, these were at different layer thicknesses, so there was a substrate effect. In addition, it is visible in the SEM images that the coatings of PLA and PHB can cause the applied layer to wave, the so-called cord buckling. This does not occur with polymer PBAT, which indicates a possible better bonding of the layer to the polymer. The chemical analyses of the layer surfaces show for each material a layer thickness dependent ratio of sp² to sp³ bonds of carbon, which alternately dominate the layer. In all polymers, the sp³ bond initially dominates, but the sp² to sp³ ratio changes at different intervals. Although the polymers were coated in the same plasma, i.e. the respective layer thicknesses (50 nm, 100 nm, ...) were applied in the same plasma process, the respective systems differed considerably from each other. A substrate effect is therefore demonstrably present. In addition, it was found that a change in the dominant bond from sp³ to sp² is an indication ofan upcoming layer failure of the a-C:H layer deposited on the polymer. In the case of PLA, this occurs immediately with change to sp² as the dominant bond; in the case of PHB and PBAT, this occurs with different delay to increased layer thicknesses (at PHB 100 nm, at PBAT approx. 200 nm.
Overall, this thesis shows that there is a substrate effect in the coating of the biodegradable polymers PLA, PHB and PBAT, since despite the same coating there is a different chemical composition of the surface at the respective layer thicknesses. In addition, a layer failure can be predicted by analyzing the existing bond.
